Deposition and Growth Atomic Layer Deposition (ALD) Plasma Enhanced Chemical Vapour Deposition (PECVD) Ultra High Vacuum E-Beam Evaporation Ultra High Vaccum Metal and Dielectric Sputtering Thermal Evaporator [Edward] Molecular Beam Epitaxy (MBE) System for Growth of Group III-V/II-IV Materials Annealing Process Furnace Rapid Thermal Annealing Rapid Thermal Processing (aka Vaccum Anneal) Magnetic Annealing System Magnetic Processing Ion Beam Deposition and Etching -SCIA Coat 200 Multi Chamber Sputtering System – Magest S200 Magnetic Annealing System Lithography Electron Beam Lithography – Ellionix Laser Writer (Class 10) Microwriter- Durham Magneto Optics Ml3 Pro (Class 10) Mask Aligner MA8 (Class 100) Mask Aligner MA6 (Class 10K) Wet Processing (Class 10K) Solvent Wet Bench (Class 10) Spin Coater (Class 100) Hot Plate (Class 10) Baking Oven (Class 10K) Etching Integrated ICP Etch Clustering System Plasma Asher Plasma Cleaner XeF2 Etcher Chemical Mechanical Planarization BEOL and Packaging Motorized Die Bonder Wire Bonder Wafer Dicer Characterisation and Metrology Atomic Force Microscopy (AFM) FE-SEM (Ultra High Resolution) – Cleanroom FE-SEM (Ultra High Resolution) – Dry Lab Ellipsometer FIB-SEM Raman Microscope S-MOKE SPM Squid Surface Profiler VSM XRD Others Cryogenic Probe Station Four Point Probe 3D Printer – Optomec Aerosol 3D Two-Photon Lithography Printer – Nanoscribe Gt2 2D Material Transfer Station With Glove Box Laser Micro-Machining Service Tool Booking 3D Printing, Electrical Test and others 2D Material Transfer Station With Glove Box Read More → 3D Printer – Optomec Aerosol Read More → 3D Two-Photon Lithography Printer – Nanoscribe Gt2 Read More → Cryogenic Probe Station Read More → Four Point Probe Read More → Laser Micro-Machining Service Read More → UV Ozone Cleaner Read More → Nanofabrication process and capability Characterisation and metroloy capability Back to top
