System Overview

The Solvent bench is designed for substrate cleaning, developing pattern after exposure, lift–off pattern transfer schemes and other fabrication operations using solvents.

Technical specifications

• Stainless steel perforated work space
• Stainless steel solvent sinks
• DI Water and N2 Teflon gun
• Differential pressure gauge to measure the difference in pressure between the bench exhaust and the room

 Location: E6-01-03, Class 10 Cleanroom

 Contact: e6nanofab@nus.edu.sg