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SOLVENT WET BENCH (CLASS 10)

System Overview

The Solvent bench is designed for substrate cleaning, developing pattern after exposure, lift–off pattern transfer schemes and other fabrication operations using solvents.


Technical specifications

  • Stainless steel perforated work space
  • Stainless steel solvent sinks
  • DI Water and N2 Teflon gun
  • Differential pressure gauge to measure the difference in pressure between the bench exhaust and the room

 

 Location: E6-01-03, Class 10 Cleanroom

 Contact: e6nanofab@nus.edu.sg