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OPTICAL MICROSCOPE

System Overview

The Nikon Eclipse L200 series performs exceptionally precise optical inspection of wafers, photo masks, reticles and other substrates.

 
Main Body
 

Built-in Episcopic Illumination; built-in power sources for motorized control; light intensity control; aperture diaphragm control.

Focusing Mechanism

  • Cross travel: 29mm
  • Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism)
  • Fine: 0.1mm per rotation (in 1µm increments)
 
Episcopic Illuminator
  • 12V/100W halogen lamp light source built-in; otorized aperture diaphragm
  • fixed field diaphragm (with focus target)
 
Eyepiece Tube
  • L2TT Ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°);F.O.V: 25mm
  • 2-way optical path changeover
 
Stage
  • 8 x 8 Stage; stroke: 205 x 205mm
  • Coarse/fine movement changeover possible
  • Fixed-position X-Y fine-movement controls
 
Eyepieces
  • CFI eyepiece lens series
 
Objectives
  • CFI60 LU/L Plan series

 

Location: E6-01-01

Contact: e6nanoab@nus.edu.sg