OPTICAL MICROSCOPE
System Overview
The Nikon Eclipse L200 series performs exceptionally precise optical inspection of wafers, photo masks, reticles and other substrates.
Main Body
Built-in Episcopic Illumination; built-in power sources for motorized control; light intensity control; aperture diaphragm control.
Focusing Mechanism
- Cross travel: 29mm
- Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism)
- Fine: 0.1mm per rotation (in 1µm increments)
Episcopic Illuminator
- 12V/100W halogen lamp light source built-in; otorized aperture diaphragm
- fixed field diaphragm (with focus target)
Eyepiece Tube
- L2TT Ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°);F.O.V: 25mm
- 2-way optical path changeover
Stage
- 8 x 8 Stage; stroke: 205 x 205mm
- Coarse/fine movement changeover possible
- Fixed-position X-Y fine-movement controls
Eyepieces
- CFI eyepiece lens series
Objectives
- CFI60 LU/L Plan series
Location: E6-01-01
Contact: e6nanoab@nus.edu.sg