E-Beam Evaporation System for Metal Deposition

Model: Edward Auto 306 Turbo

Substrate size: Irregular to standard 8”dia wafer. 

Metals:  Aluminum, Nickel, Titanium, Gold, Gold-Germanium,
              Palladium and Platinum.

Crucibles: Intermetallic-IML, Graphite liner-GL and
                ThickWall Graphite Liner-TWGL.

Location: E6-02-08, Dry Lab.

Contact: e6nanofab@nus.edu.sg