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Fe-SEM (ULTRA HIGH RESOLUTION)

System Overview

Multi-signal detection and imaging system, for elemental composition, crystal and surface information.

  • Model: Hitachi Regulus 8230

Technical Specifications

  • Accelerating Voltage: 0.5 – 30kV
  • Resolution: 0.7nm at 15kV (SE) 0.9nm at 1kV w/ deceleration (SE)
  • Magnification Range: 20X – 2,000 X (Low Mag) 100X – 2,000,000X (High Mag)
  • Detectors: Lower/ Upper/ Top, YAG BSE, STEM (Bright-Field/ PD-Dark Field) and EDX.
  • Stage Traverse: (5-axis Motorized) X: 0 – 110mm Y: 0 – 11mm Z: 1.5 – 40mm R: 360° T: -5° – +70°
  • Observable Range: 150mm dia. (MAX Sample Size)
  • Specimen Exchange Chamber size: 6 inch dia.
  • Mountable specimen thickness: 27mm (Diameter ≦ 33mm)

High Resolution Imaging  

 

 Location: E6-03-02, Metrology

 Contact: e6nanofab@nus.edu.sg