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MASK ALIGNER MA6 (CLASS 10K)

System Overview

ModelKarl Suss MA6


Technical Specifications

  • UV400 Exposure Optics
  • Wavelength: 365nm and 405nm
  • Substrate Size: irregular to standard 2” dia wafer
  • Mask Size: Typical 3” square
  • Wafer Thickness: < 4 mm


Location: 
E6-02-07, Level 2 Cleanroom, Class 10000

Contact: e6nanofab@nus.edu.sg