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THERMAL EVAPORATOR

Edward Evaporation System for Metal Deposition

Model: Edward Auto 306 Turbo


Substrate Size

Irregular to standard 8”dia wafer


Metals
Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.


The Application
The heating is carried out by passing a large current through a filament container
(tungsten boat or material coated tungsten rod), which has a finite electrical resistance.

 

Location: E6-02-08

Contact: e6nanofab@nus.edu.sg